Business
About Equipment Manufacturing
Cylinder cabinet
This equipment securely stores cylinders of industrial gases and is fitted with valves and measuring instruments to ensure safe gas delivery. It is primarily used in universities, research institutes, and production plants. We also offer customized design and manufacturing to meet specific customer needs, including Bulk Specialty Gas Systems (BSGS) capable of supplying large volumes of specialty gases for semiconductor production plants.
Ultra-high-purity gas purification equipment
This equipment removes impurities from a wide range of gases, including nitrogen, oxygen, hydrogen, argon, helium, and ammonia, to supply ultra-high-purity gas. We possess the technical capabilities to support models ranging from compact units for research and development to large models for major industrial plants. Our company leads the industry by designing and providing purification equipment such as the "Puremate 1400 Series."
Exhaust gas abatement systems
Many gases used in semiconductor manufacturing possess various properties, such as flammability, self-combustibility, corrosiveness, and toxicity. Exhaust gas abatement systems (scrubbers) are designed to render these gases harmless, allowing safe release into the atmosphere. Treatment methods include combustion (air-cooled or water-cooled), plasma, and adsorption (dry type). For many years, our company has developed, designed, and manufactured a wide range of emission treatment systems, and we remain committed to providing optimal solutions for safe gas handling and disposal.
Other equipment
Leveraging our comprehensive expertise, we provide optimal equipment tailored to each customer’s specific needs. Through custom solutions, we design and manufacture a range of gas equipment for semiconductor and general industrial applications.
Examples of equipment
Gas Branch Boxes (VMB: Valve Manifold Boxes)
Liquid Supply Equipment for substances such as TEOS
Mixers for various types of gases
Specialty Gas Filling Equipment
Medical Gas Filling Equipment
Hydrogen stations
Hydrogen gas, anticipated as a next-generation clean energy source due to its low carbon dioxide emissions, is used as fuel to power motors in fuel cell vehicles. Our company is involved in the construction of "hydrogen stations" that refill these vehicles with hydrogen.